Nanoscale pyrogenic oxides

摘要

Nanoscale, pyrogenically produced oxides and/or mixed oxides having a BET surface area of between 1 m²/g and 600 m²/g and a chloride content of less than 0.05 wt. % are produced by converting organometallic and/or organometalloid substances into the oxides at temperatures of above 200° C. The oxides may be used as a polishing agent in the electronics industry (CMP).