POLYMER MICROCAVITY AND MICROCHANNEL DEVICES AND FABRICATION METHOD

摘要

A microplasma device includes a substrate (12) and either or both of a microchannel (50) or microcavity (16) defined in a polymer layer (18) supported by the substrate. Electrodes (14, 24) arranged with respect to the polymer material can excite a plasma in a discharge medium contained in the microchannel or the microcavity or both. A method of forming a microplasma device places a curable polymer material between a mold having a negative volume impression of microcavities and/or microchannels and a substrate. The polymer is cured and then the mold is separated from the solid polymer.