发明名称 |
SILICON-GERMANIUM HYDRIDES AND METHODS FOR MAKING AND USING SAME |
摘要 |
The present invention provides silicon-germanium hydride compounds, methods for their synthesis, methods for their deposition, and semiconductor structures made using the compounds. The compounds are defined by formula : SiHnI (GeHn2)y, wherein y is 2, 3, or 4 wherein nl is 0 1, 2 or 3 to satisfy valency and wherein n2 is independently 0, 1, 2 or 3 for each Ge atom in the compound, to satisfy valency. |
申请公布号 |
WO2007062096(A3) |
申请公布日期 |
2007.08.02 |
申请号 |
WO2006US45156 |
申请日期 |
2006.11.21 |
申请人 |
THE ARIZONA BOARD OF REGENTS, A BODY CORPORATE ACTING ON BEHALF OF ARIZONA STATE UNIVERSITY;KOUVETAKIS, JOHN;RITTER, COLE, J.,III |
发明人 |
KOUVETAKIS, JOHN;RITTER, COLE, J.,III |
分类号 |
C01B6/06;H01L21/205 |
主分类号 |
C01B6/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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