| 摘要 |
An apparatus for dispensing multiple precursors to a manufacturing tool includes a fluidic manifold having a plurality of interconnected sub-manifolds, a plurality of tanks, each tank containing a different precursor, and wherein each of the sub-manifolds is connected to one of the tanks. A system for dispensing multiple precursors to a manufacturing tool includes a multiple precursor dispenser having a fluidic manifold and a plurality of tanks, each tank containing a different precursor and connected to a different sub-manifold of the fluidic manifold, the sub-manifolds being interconnected, a manufacturing tool fluidic processor having a plurality of canisters, each canister containing a different precursor, wherein a first dispenser tank communicates with a first tool canister having the same precursor, and wherein a second dispenser tank communicates with a second tool canister having the same precursor. Related methods are also described herein.
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