发明名称 SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device in which a flat crystal growth film is formed on a substrate in which pits and projections are selectively formed. <P>SOLUTION: The semiconductor device comprises a substrate 10 and a semiconductor layer formed on the substrate 10. The substrate 10 has a flat area 20 provided on a main surface; a first uneven area 21 provided in a portion different from the flat area 20, and formed with a first recess 11; and a second uneven area 22 which is provided between the first uneven area 21 and the flat area 20, and is formed with a second recess 12 in which a generation probability of a growing core, when a semiconductor is crystal-grown on the main surface, is lower than the first uneven area 21 and higher than the flat area 20. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007194450(A) 申请公布日期 2007.08.02
申请号 JP20060011969 申请日期 2006.01.20
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 TAKASE HIROSHI
分类号 H01L33/16;H01L33/22;H01L33/32 主分类号 H01L33/16
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