发明名称 METHOD OF MANUFACTURING TRANSISTOR
摘要 PROBLEM TO BE SOLVED: To easily obtain an FET using a carbon nanotube having desired semiconductor characteristics. SOLUTION: Metallic carbon nanotubes 103a, 103b, 103c and a semiconductor carbon nanotube 104 are mixedly provided between metallic electrodes 102 arranged on a substrate 101. The metallic carbon nanotubes 103a, 103b, 103c to be put in a semiconductor state and the carbon nanotube 104 to be changed in its semiconductor characteristic are selectively illuminated with photons (light). For example, the carbon nanotube 104 is a target to be changed to its more remarkable semiconductor characteristic. In the light illumination, a mask is used so that the carbon nanotube 103c not as a change target is not illuminated with photons. With use of such a mask, only a desired region can be illuminated with photons. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007194466(A) 申请公布日期 2007.08.02
申请号 JP20060012289 申请日期 2006.01.20
申请人 NIPPON TELEGR & TELEPH CORP <NTT> 发明人 KANZAKI KENICHI;SUZUKI SATORU;MAEDA FUMIHIKO;KOBAYASHI YOSHIHIRO
分类号 H01L29/786;B82B3/00;H01L21/26 主分类号 H01L29/786
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