| 摘要 |
PROBLEM TO BE SOLVED: To prevent a water immersion to an electrode layer in order to prevent a cause of insulation failure and a performance deterioration of a dielectric film, which provides a thin film capacitor having a stable performance for a long period of time. SOLUTION: A method for manufacturing the thin film capacitor comprises the steps of forming metal layers (13, 14) to be a lower electrode on a support substrate (11), and a dielectric film (15) on the metal layers; forming a first opening (24) which covers the dielectric film with a protective film (40) and exposes a part of a metal film by piercing the protective film and the dielectric film, and a second opening (23) which pierces the protective film and exposes a part of the dielectric film; and respectively filling a conductive material to the first opening and the second opening, and respectively forming a lower electrode (27) connected to the metal layer and an upper electrode (26) conjugated to the upper surface of the dielectric film. COPYRIGHT: (C)2007,JPO&INPIT
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