| 摘要 |
<P>PROBLEM TO BE SOLVED: To facilitate prealignment by simple configuration if required when a workpiece is placed in a proximity exposure device or the like. <P>SOLUTION: When a substrate W is placed on a placing table 6 of a prealignment unit, edge positions are detected with edge sensors 11a-11c, a shift amount θ in a rotation direction to a prealignment position is measured, and a turning operation mechanism 10 is actuated so as to eliminate the measured shift amount θ in the rotation direction, whereby the placing table 6 is turned. In this state, shift amounts X<SB>E</SB>and Y<SB>E</SB>in XY directions are measured again from edge positions, these shift amounts X<SB>E</SB>and Y<SB>E</SB>are transmitted to a proximity exposure device PE, a work stage 32 is moved so as to eliminate the shift amounts X<SB>E</SB>and Y<SB>E</SB>before the substrate W is placed from the prealignment unit PU by a conveyance mechanism CM, and the glass substrate W is received. <P>COPYRIGHT: (C)2007,JPO&INPIT |
