| 摘要 |
PROBLEM TO BE SOLVED: To provide a process for manufacturing a liquid ejection head which keeps cost reduced by simplifying the manufacturing process. SOLUTION: The process for manufacturing a liquid ejection head including a channel forming board composed of a silicon board and a reservoir forming board 30 bonded to one surface side of the channel forming board comprises a step for forming a barrier film 131 covering at least the opening of a reservoir portion on the other surface of the reservoir forming board 30 opposite to the one surface bonded to the channel forming board, a step for forming the reservoir portion 31 in the reservoir forming board 30, a step for bonding the reservoir forming board 30 to one surface of the channel forming board, a step for forming a pressure generation chamber and an interconnecting portion by performing wet etching from the other surface side of the channel forming board, and a step for removing the barrier film 131. COPYRIGHT: (C)2007,JPO&INPIT
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