HIGH CONCENTRATION IMPURITY DIAMOND THIN FILM, AND ITS PRODUCTION PROCESS

摘要

PROBLEM TO BE SOLVED: To provide a high concentration impurity diamond thin film employing an impurity concentration inclination layer, and to provide its production process. SOLUTION: An inclination layer where the impurity concentration becomes higher sequentially from the diamond single crystal substrate side is formed by providing a plurality of layers of impurity diamond thin film having different impurity concentrations on the diamond single crystal substrate wherein the outermost layer of diamond thin film contains impurities with highest concentration. Its production process is also provided. COPYRIGHT: (C)2007,JPO&INPIT