| 摘要 |
PROBLEM TO BE SOLVED: To provide an axial fine movement mechanism with a rotating mechanism capable of performing a fine movement with long stroke and high responsiveness and preventing piezoelectric actuators from being damaged. SOLUTION: A rough movement mechanism comprises a screw shaft rotatably supported on a base and nuts screwed to the screw shaft and fixed to a moving stand. The moving stand is axially moved relative to the base by rotating the screw shaft. The axial fine-movement mechanism with the rotating mechanism comprises two rolling bearing devices disposed oppositely to each other and to which preload is imparted, a housing fixed to the base and in which the outer rings of the rolling bearing devices are fitted, and two piezoelectric actuators arranged in series in the extending direction. The inner rings of the rolling bearing devices are fitted to the screw shaft and axially fixed. One of the outer rings is restrained in the axial direction, and the axial distance between the outer rings is changed by extending the piezoelectric actuators. COPYRIGHT: (C)2007,JPO&INPIT
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