| 摘要 |
A liquid chemical supply system includes a liquid chemical pump having a pump chamber for supplying a liquid chemical and a volume variation member that will vary the volume of the pump chamber, and will intake or discharge the liquid chemical based upon a change in the volume of the pump chamber in accordance with the volume variation member. The system also comprises an operation means for causing the volume variation member to operate, an operation amount detection means for detecting the operation amount of the volume variation member, a displacement control means for performing displacement control so that the volume variation member will be displaced by the operation means when liquid chemical ports that lead to the pump chamber are in the closed state, and a determination means for determining the presence or absence of gas inside the pump chamber based upon the operation amount detection results from the operation amount detection means during displacement control.
|
