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发明名称
METHOD AND DEVICE FOR THERMALLY TREATING SUBSTRATES
摘要
申请公布号
EP1812957(A1)
申请公布日期
2007.08.01
申请号
EP20050807468
申请日期
2005.11.12
申请人
STEAG HAMATECH AG
发明人
SAULE, WERNER;BERGER, LOTHAR;KRAUSS, CHRISTIAN;WEIHING, ROBERT
分类号
H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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