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发明名称
Si3N4 stamp for nano-imprint, and fabrication method of Si3N4 stamp
摘要
申请公布号
KR100744550(B1)
申请公布日期
2007.08.01
申请号
KR20060014229
申请日期
2006.02.14
申请人
发明人
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
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