| 摘要 |
<p>A chemical supply system is provided to detect securely the flow of gas into a pump chamber of a chemical pump and to perform properly a chemical spraying process of the chemical pump. A chemical supply system includes a chemical pump, an operating unit, an operating amount detecting unit, a displacement manipulating unit and a determination unit. The chemical pump(10) includes a pump chamber for filling chemicals and a volume variable member(12) capable of varying the volume of the pump chamber. The chemical pump is capable of absorbing or spraying the chemicals on the basis of the variation of volume of the pump chamber. The operating unit is used for operating the volume variable member. The operating amount detecting unit is used for detecting an operating amount of the volume variable member. The displacement manipulating unit is used for changing the position of the volume variable member in a closed state of a chemical port. The determination unit is used for determining the existence of gas in the pump chamber on the basis of the results of the operating amount detecting unit.</p> |
