| 发明名称 |
High temperature evaporator cell and method of evaporating high-melting materials |
| 摘要 |
<p>A vaporization cell (100) comprises a crucible (10) for receiving the vaporization raw material and a heating device (10) with a heating resistance (21) for resistance heating of the crucible. The heating resistance (21) is provided as an electron emitter for electron-beam heating of the crucible (10). Independent claims are included for the following (a) a coating installation; and (b) a method for vaporization of high melting-point vaporization raw material</p> |
| 申请公布号 |
EP1732129(A3) |
申请公布日期 |
2007.08.01 |
| 申请号 |
EP20060011125 |
申请日期 |
2006.05.30 |
| 申请人 |
CREATEC FISCHER & CO. GMBH;FORSCHUNGSVERBUND BERLIN E.V. |
发明人 |
BRAUN, WOLFGANG;FISCHER, ALBRECHT |
| 分类号 |
H01L23/34;C23C14/24;C30B23/06 |
主分类号 |
H01L23/34 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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