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发明名称
Manufacturing method for semiconductor device
摘要
申请公布号
KR100744682(B1)
申请公布日期
2007.08.01
申请号
KR20050058520
申请日期
2005.06.30
申请人
发明人
分类号
H01L21/335
主分类号
H01L21/335
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代理人
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地址
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