发明名称
摘要 A method of manufacturing a semiconductor device includes: a first step of forming a first through hole that penetrates the location of the electrode in a semiconductor element having an electrode; a second step of providing an insulating material in a region including an inside of the first through hole, in such a manner that a second through hole is provided penetrating through the insulating material; and a third step of providing a conductive member within the second through hole that penetrates through at least the insulating material in the inside of the first through hole.
申请公布号 JP3951091(B2) 申请公布日期 2007.08.01
申请号 JP20000236811 申请日期 2000.08.04
申请人 发明人
分类号 H01L23/12;H01L25/18;H01L21/768;H01L21/98;H01L23/48;H01L23/485;H01L25/065;H01L25/07 主分类号 H01L23/12
代理机构 代理人
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