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发明名称
SAM coating method on a substrate using spin-coating and coating substrate thereof
摘要
申请公布号
KR100745171(B1)
申请公布日期
2007.08.01
申请号
KR20060006565
申请日期
2006.01.21
申请人
发明人
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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