SEMICONDUCTOR MANUFACTURING APPARATUS CAPABLE OF DETECTING TEMPERATURE OF CHEMICAL

摘要

A semiconductor manufacturing apparatus having a function of detecting a temperature of chemical is provided to prevent quality deterioration due to variation in the temperature of the chemical by detecting the temperature of the chemical which is distributed onto a wafer. A wafer(W) is supported by a chuck(110), and a nozzle(120) sprays chemical onto the wafer. The chemical is supplied to the nozzle by a chemical line(130). Water is circulated along an outer wall of the chemical line by a circulator(140). A temperature sensor(150) is built in the chuck to detect a temperature of the chemical which is actually distributed onto the wafer. The temperature sensor is electrically connected to the circulator.