BURN-IN APPARATUS AND METHOD

摘要

A BURN-IN APPARATUS USED IN BURN-IN TESTS INCLUDES A BURN-IN TEST CHAMBER FOR ACCOMMODATING A PLURALITY OF SEMICONDUCTOR DEVICES TO BE TESTED. ALSO, THE BURN-IN APPARATUS INCLUDES MEASURING MEANS FOR DETECTING ELECTRIC CHARACTERISTICS OF TEMPERATURE SENSORS BUILT IN THE RESPECTIVE SEMICONDUCTOR DEVICES TO INDIVIDUALLY MEASURE JUNCTION TEMPERATURES OF THE SEMICONDUCTOR CHIPS INCORPORATED IN THE RESPECTIVE SEMICONDUCTOR DEVICES, AND LASER BEAM IRRADIATING MEANS OR ELECTRIC HEATING MEMBERS. THE LASER IRRADIATING MEANS OR THE HEATING MEMBERS ARE CONTROLLED BY CONTROL MEANS, BASED ON OUTPUTS OF THE MEASURING MEANS. THUS, THE JUNCTION TEMPERATURES ARE MAINTAINED IN A SET JUNCTION TEMPERATURE RANGE, AND THE SCREENING ACCURACY CAN BE IMPROVED.(FIG. 3)