| 发明名称 |
SOL-GEL PREPARATION OF SILICA OR SILICA-BASED VITREOUS FILMS |
| 摘要 |
A sol-gel process allowing the preparation, on a substrate, of glassy films of silicon oxide or mixed oxides based on silicon oxide, of thickness above 1 micrometer, generally between 2 and 20 micrometers. They are characterised b y absence of defects, and are particularly suitable as waveguides in flat optical devices. |
| 申请公布号 |
CA2343726(C) |
申请公布日期 |
2007.07.31 |
| 申请号 |
CA19992343726 |
申请日期 |
1999.09.06 |
| 申请人 |
NOVARA TECHNOLOGY S.R.L. |
发明人 |
GRANDI, STEFANIA;COSTA, PIER PAOLO;COSTA, LORENZO |
| 分类号 |
C01B33/12;G02B6/13;C01B33/14;C01B33/143;C01B33/152;C01B33/154;C03B8/02;C03B19/12;C03C1/00;C23C18/12 |
主分类号 |
C01B33/12 |
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