METHOD FOR STORING CARRIER FOR POLISHING WAFER

摘要

TO PROVIDE A METHOD FOR STORING A CARRIER (14) FOR POLISHING A SILICON WAFER (3), WHICH CAN STORE THE CARRIER (14) IN A MANNER TO REDUCE SCRATCHES ON THE SILICON WAFER (3).THE METHOD INCLUDES STORING A CARRIER (14) FOR USE IN POLISHING A SILICON WAFER (3) COMPLETELY IMMERSED IN A LIQUID.AT LEAST A SUBSTANTIAL PORTION OF THE LIQUID IS DEIONIZED WATER.(FIG 1)