发明名称 Wirebond crack sensor for low-k die
摘要 A sensor for measuring cracks in a semiconductor device, such as a wafer and, more particularly, to a BEOL wirebond crack sensor for low-k dies or wafers, and a method of providing the wirebond crack sensor for low-k wafers or the like structures.
申请公布号 US7250311(B2) 申请公布日期 2007.07.31
申请号 US20050906507 申请日期 2005.02.23
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 AOKI TOYOHIRO;BURRELL LLOYD G.;SAUTER WOLFGANG
分类号 H01L21/66;H01L23/48 主分类号 H01L21/66
代理机构 代理人
主权项
地址