发明名称 |
APPARATUS AND METHOD FOR DIE ATTACHMENT. |
摘要 |
THE INVENTION PROVIDES AN APPARATUS FOR DIE (10) ATTACHMENT ONTO A SUBSTRATE (16) INCLUDING NON-METALLIC MATERIAL, AND METALLIC MATERIAL (13) THAT IS ADAPTED TO RECEIVE A DIE HAVING A EUTECTIC COATING. A HEATING CONDUIT IS PROVIDED THROUGH WHICH THE SUBSTRATE (16) IS MOVABLE FOR HEATING THE METALLIC MATERIAL TO A EUTECTIC BONDING TEMPERATURE TO FACILITATE BONDING BETWEEN THE DIE (10) AND THE METALLIC MATERIAL (13) AT A DIE-ATTACH POSITION.AN INDUCTION HEATING DEVICE AT THE DIEATTACH POSITION.AN INDUCTION HEATING DEVICE AT THE DIE-ATTACH POSITION HEATS THE METALLIC MATERIAL OF THE SUBSTRATE (16) TO THE EUTECTIC BONDING TEMPERATURE PRIOR TO ATTACHING A ONTO THE METALLIC MATERIAL.(FIG 5)
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申请公布号 |
MY131043(A) |
申请公布日期 |
2007.07.31 |
申请号 |
MY2005PI00673 |
申请日期 |
2005.02.22 |
申请人 |
ASM ASSEMBLY AUTOMATION LTD |
发明人 |
LIU DEMING;FU RAN;LAM KUI KUM;NG MAN CHUNG, RAYMOND;CHEUNG WAI YUEN |
分类号 |
H01L21/44;H01L21/52;H01L21/00;H01L21/60;H01L23/498 |
主分类号 |
H01L21/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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