发明名称 APPARATUS AND METHOD FOR DIE ATTACHMENT.
摘要 THE INVENTION PROVIDES AN APPARATUS FOR DIE (10) ATTACHMENT ONTO A SUBSTRATE (16) INCLUDING NON-METALLIC MATERIAL, AND METALLIC MATERIAL (13) THAT IS ADAPTED TO RECEIVE A DIE HAVING A EUTECTIC COATING. A HEATING CONDUIT IS PROVIDED THROUGH WHICH THE SUBSTRATE (16) IS MOVABLE FOR HEATING THE METALLIC MATERIAL TO A EUTECTIC BONDING TEMPERATURE TO FACILITATE BONDING BETWEEN THE DIE (10) AND THE METALLIC MATERIAL (13) AT A DIE-ATTACH POSITION.AN INDUCTION HEATING DEVICE AT THE DIEATTACH POSITION.AN INDUCTION HEATING DEVICE AT THE DIE-ATTACH POSITION HEATS THE METALLIC MATERIAL OF THE SUBSTRATE (16) TO THE EUTECTIC BONDING TEMPERATURE PRIOR TO ATTACHING A ONTO THE METALLIC MATERIAL.(FIG 5)
申请公布号 MY131043(A) 申请公布日期 2007.07.31
申请号 MY2005PI00673 申请日期 2005.02.22
申请人 ASM ASSEMBLY AUTOMATION LTD 发明人 LIU DEMING;FU RAN;LAM KUI KUM;NG MAN CHUNG, RAYMOND;CHEUNG WAI YUEN
分类号 H01L21/44;H01L21/52;H01L21/00;H01L21/60;H01L23/498 主分类号 H01L21/44
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