COOLING APPARATUS HAVING AUXILIARY CHILLER AND SEMICONDUCTOR FABRICATING METHOD USING THE SAME

摘要

A cooling apparatus and a method for manufacturing a semiconductor device using the same are provided to keep uniformly the temperature of a wafer chuck in an aiming range by cooling additionally the wafer chuck in case of an abnormal temperature state of the wafer chuck using an auxiliary chiller. A cooling apparatus includes a support unit, a main chiller, a coolant passages and an auxiliary chiller. The support unit is used for loading stably a wafer. The support unit has a cooling room. The main chiller(30) is spaced apart from the support unit. The main chiller includes a main coolant room. The coolant passages are used for connecting the cooling room and the main coolant room with each other. The auxiliary chiller(84) is capable of attaching/detaching to/from the coolant passages.