| 摘要 |
A robot arm for transferring a liquid crystal display substrate is provided to protect the liquid crystal display substrate from dust generated due to vibration during delivery of a sensor line and a vacuum tube, by covering a tube groove with a tube cover. A robot arm(10) made of a carbon fiber reinforced plastic has one surface with a tube groove(40) for insertion of a sensor line(31) and a vacuum tube(30). A tube cover(20) made of a carbon fiber reinforced plastic is arranged to cover the vacuum tube and the sensor line inserted in the tube groove. The robot arm has a center with a sensor hole(80) for passage of a sensor and a vacuum suction port. The sensor hole has one side with a cover groove(60) to which a rear cover(50) made of a metal material is coupled. The tube groove is formed in a lengthwise direction from the sensor hole. The robot arm is equipped with a protection cap(70) made of a metal material and removably coupled by a screw.
|
