| 摘要 |
Provided is a method for preparing a bio-chip which is able to easily form a fine-structured pattern on a substrate and shows high process efficiency and economic efficiency. The method comprises the steps of: (a) forming an embossed pattern on the surface of a solidified polydimethylsiloxane(PDMS) to prepare a PDMS stamp; (b) preparing a subject substrate by washing and drying a substrate and then sequentially depositing Cr and Au on the surface of the substrate; (c) covering the embossed pattern of the PDMS stamp with a polymer material; (d) connecting the polymer material-covered PDMS stamp with the subject substrate so as to move the polymer material into the depositing side of the subject substrate corresponding to the embossed pattern, thereby forming a polymer pattern; and (e) separating the PDMS stamp from the subject substrate. The PDMS stamp is prepared by coating a photoresist composition on a wafer, exposing, developing and drying the photoresist layer to form a channel pattern on the wafer, coating and drying a liquid PDMS on the channel pattern-formed wafer to solidify the PDMS and then separating the solidified PDMS from the wafer.
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