| 摘要 |
A method for manufacturing a probe card is provided to enhance the heat characteristic by additionally forming a conductive plug between a space transformer and a probe beam. A substrate(100) is etched to form a through-hole, and then a conductive plug is formed to bury the through-hole. A lower interconnection which is connected to the conductive plug is formed on a first surface of the substrate. A conductive bump is formed on the lower interconnection of the conductive plug, and then an adhesive layer(310) is formed on a surface of the conductive bump. An end portion of a probe beam(410) is adhered to the conductive bump via the adhesive layer.
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