APPARATUS TESTING FAULTY SUBSTRATE

摘要

An apparatus of testing a faulty substrate is provided to further minutely test a defect by forming to be imaged through a lens installed to be separated at a fixed interval in the front of a camera to condense light. An apparatus of testing a faulty substrate(10) includes a stage(20), a light source(30), a camera(40), and a blocking board(50). The substrate is floated to be transferred. The air nozzle is installed on the stage to float the substrate and a penetrating unit is formed on the stage. The light source is installed on a bottom of the stage to illuminate light to a top direction. The camera images the light transmitting the substrate by the light source. The penetrating unit is combined with the blocking board to improve the flatness of the substrate while the light is transmitted through the penetrating unit.