发明名称 Capacitor of semiconductor device and method for fabricating the same
摘要 A capacitor of a semiconductor device and a method for fabricating the same may be provided. The method may include forming an interlayer insulation layer, an etch stop layer, and/or a sacrificial insulation layer on a semiconductor substrate, patterning the interlayer insulation layer, the etch stop layer, and/or the sacrificial insulation layer to form a contact hole exposing a desired or predetermined region of the semiconductor substrate, filling the contact hole to form a contact plug, removing the sacrificial insulation layer to expose an upper portion of the contact plug, and/or forming a dielectric layer and/or a top electrode on the exposed upper portion of the contact plug.
申请公布号 US2007170488(A1) 申请公布日期 2007.07.26
申请号 US20070655944 申请日期 2007.01.22
申请人 SAMSUNG ELECTRONICS CO. LTD. 发明人 RYU MI-YOUNG;CHAE HEE-IL
分类号 H01L27/108;H01L21/20 主分类号 H01L27/108
代理机构 代理人
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