| 摘要 |
<P>PROBLEM TO BE SOLVED: To realize a charged particle beam optical system with good resolution. <P>SOLUTION: A charged particle beam apparatus has: a thin film lens 21 constituted of a thin film through which a charged particle beam EB to be radiated to a specimen 20 transmits, and an aperture placed in the vicinity of the thin film; a lens for converging the charged particle beam onto a surface of the specimen; and a means 22 for applying a potential difference between the thin film and the aperture. The thin film lens 21 is provided in the vicinity of a front focal position of a last stage lens 11. <P>COPYRIGHT: (C)2007,JPO&INPIT |
