发明名称 METHOD AND APPARATUS FOR GROWING CRYSTAL, GROUP III NITRIDE CRYSTAL, AND GROUP III NITRIDE SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a group III nitride crystal having a practical size for manufacturing a high performance light-emitting diode, an LD or the like without complicating a process, using an expensive reactor, and making the crystal size small; and to provide a method and an apparatus capable of growing such a group III nitride crystal. <P>SOLUTION: When the group III nitride crystal is grown in a first reaction vessel 101 by using a mixed melt 102 containing an alkali metal and at least a group III metal and a nitrogen raw material introduced from the outside of the first reaction vessel 101, the vapor of the alkali metal is shut up in the first reaction vessel 101. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007186420(A) 申请公布日期 2007.07.26
申请号 JP20070074497 申请日期 2007.03.22
申请人 RICOH CO LTD 发明人 SARAYAMA SHOJI;SHIMADA MASAHIKO;YAMANE HISANORI
分类号 C30B29/38;C30B9/00;H01L33/32 主分类号 C30B29/38
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