Verfahren zum Abtrag von lichtdurchlässigen Materialien mit Laserstrahlung und Vorrichtung hierfür

摘要

The method involves applying pulse laser beams (1) to the side (5) of the transparent material (2) which is opposite the incoming laser beam and is in contact with a fluid (3) which has metallic properties and a high absorption coefficient. The fluid contains a metal or metal alloy such as gallium, indium or mercury. An independent claim is included for a device for implementing method to etch transparent materials through pulsed laser beams where a fluid with metal properties is disposed on the opposite side of a transparent material in relation to incoming laser beam and contacts this transparent material. The fluid is localised on the transparent material through side borders (4) but there is no closed cavity . Heating devices can be provided to heat the transparent material and fluid.