发明名称 SEMICONDUCTOR DEVICE AND ITS FABRICATION PROCESS
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device in which complication of fabrication process is suppressed and the capacity of a capacitor for storing data is increased. <P>SOLUTION: A plurality of wiring layers are provided in the peripheral circuit portion and the memory cell has a capacitor where a plate electrode, a capacitance insulating film formed on the sidewall of an opening in the plate electrode, and a storage electrode buried in the opening where the capacitance insulating film is formed on the sidewall are provided in correspondence with the plurality of wiring layers and the storage electrodes are connected with each other. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007189009(A) 申请公布日期 2007.07.26
申请号 JP20060004827 申请日期 2006.01.12
申请人 ELPIDA MEMORY INC 发明人 UCHIYAMA HIROYUKI
分类号 H01L21/8242;H01L27/108 主分类号 H01L21/8242
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