CONDUCTIVE CARBON NANOTUBE TIP, SCANNING PROBE MICROSCOPE WITH SAME, AND METHOD FOR MANUFACTURING SAME

摘要

PROBLEM TO BE SOLVED: To provide a conductive carbon nanotube tip, a scanning probe microscope with the same, and a method for manufacturing the same. SOLUTION: The conductive carbon nanotube tip includes: a carbon nanotube being disposed upright on a substrate; and a ruthenium coating layer which coats at least a portion of the surface of the carbon nanotube tip and the substrate. The method for manufacturing the carbon nanotube tip comprises: the step (a) of disposing the carbon nanotube upright on the substrate; and the step (b) of forming the ruthenium coating layer which coats at least a portion of the carbon nanotube tip and the substrate, by using an atomic layer evaporation method. COPYRIGHT: (C)2007,JPO&INPIT