MANUFACTURING METHOD OF ELECTRO-OPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an EL display device with high operation property reliability. SOLUTION: A plurality of TFTs are formed on a substrate, and a carbon film including at least a diamond thin film or an amorphous carbon film is formed on the plurality of FETs. A flattened film is formed on the carbon film and a contact hole is formed on the carbon film and the flattened film. A plurality of pixel electrodes connected to the plurality of TFTs respectively are formed through the contact hole, and an EL layer is selectively formed on the plurality of pixel electrodes by ink-jet method. COPYRIGHT: (C)2007,JPO&INPIT