摘要 |
PROBLEM TO BE SOLVED: To provide a contact probe that can reduce the contact resistance and is also excellent in durability. SOLUTION: In the contact probe, a gold plated film 11c that is constituted by crystallites whose mean particle diameter is in the range from 17 nm to 25 nm and is made of gold single metallic elements whose Vickers hardness is 160 Hv or more is formed in a part brought into contact with another object in at least inspection. COPYRIGHT: (C)2007,JPO&INPIT
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