发明名称 CONTACT PROBE
摘要 PROBLEM TO BE SOLVED: To provide a contact probe that can reduce the contact resistance and is also excellent in durability. SOLUTION: In the contact probe, a gold plated film 11c that is constituted by crystallites whose mean particle diameter is in the range from 17 nm to 25 nm and is made of gold single metallic elements whose Vickers hardness is 160 Hv or more is formed in a part brought into contact with another object in at least inspection. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007187580(A) 申请公布日期 2007.07.26
申请号 JP20060006612 申请日期 2006.01.13
申请人 MIKUNI KOGYO:KK;SHINSHU UNIV 发明人 FUJISHIGE MASATSUGU;ARAI SUSUMU;O MINE
分类号 G01R1/067;G01R31/26;H01L21/66 主分类号 G01R1/067
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