CARBON WIRE SEALED HEATER

摘要

PROBLEM TO BE SOLVED: To provide a carbon wire sealed heater with excellent heat generating property and little unevenness of heat generation, restrained from generation of black points. SOLUTION: On the carbon wire sealed heater 1 formed by sealing a carbon wire 4 formed by braiding a plurality of carbon fibers in a quartz glass member 20, amount of water adsorbed on the carbon wire 4 is 2×10-3g/cm3or less. The quartz glass member 20 is formed into tube-shape, and the ratio of the diameter of the carbon wire and inner diameter of the quartz glass tube is 1:2 to 5. COPYRIGHT: (C)2007,JPO&INPIT