| 摘要 |
PROBLEM TO BE SOLVED: To detect weak reflected signals from a boundary surface using a simple constitution, to detect the position of the boundary surface of first and second layers, having different properties in a test target. SOLUTION: A pair of oblique angle probes 2a and 2b, capable of transmitting and receiving an ultrasonic wave, are electrically connected, in parallel to each other and placed in opposed relation to the surface 101 of the test target 100. Ultrasonic waves are respectively transmitted from a pair of the oblique angle probes 2a and 2b, and the respective reflected signal, from the boundary surface 104 and the base 105 of the test object, are respectively received by a pair of the oblique angle probes 2a and 2b to detect the position of the boundary surface. COPYRIGHT: (C)2007,JPO&INPIT
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