| 摘要 |
PROBLEM TO BE SOLVED: To provide a droplet ejection head which can attain a high density of nozzles and prevent nozzles from causing a pressure interference, and to provide its manufacturing process. SOLUTION: The droplet ejection head comprises a nozzle substrate 1 having a plurality of nozzle holes 11, a cavity substrate 3 having a plurality of ejection chambers 31 and making a droplet to be ejected from a nozzle hole 11 corresponding to each ejection chamber 31 by utilizing a pressure variation thereof, and a reservoir substrate 2 communicating with the ejection chamber 31 and having a reservoir 23 for storing liquid being fed to the ejection chamber 31. The reservoir substrate 2 has the front and rear surfaces composed of a silicon substrate having the plane direction of 100, and the sidewall 25 composing the reservoir 23 serves as a diaphragm composed of a tilting wall having the plane direction of 111 obtained by etching the silicon substrate from the opposite sides. COPYRIGHT: (C)2007,JPO&INPIT
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