| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To precisely and certainly estimate the decomposition time of a detoxifying agent in an exhaust gas treating device and to eliminate the waste time for exchange by automatically exchange the detoxifying agent from the decomposition time. <P>SOLUTION: The exhaust gas treating device is provided with a gas utilizing facility 1 such as a dry etching device, a gas supply device 2 supplying a gas such as C<SB>3</SB>F<SB>8</SB>to the gas utilizing facility 1, a detoxifying device 4 receiving an exhaust gas from the gas utilizing facility 1 and detoxifying it, a detoxifying filling and discharging device 5 and a control device 6. The data of the kind of gases, the flow rate and the supplying time fed from the gas supply device 2 to the gas utilizing facility 1 is fed to the control device 6. The control device 6 estimates the decomposition time of a detoxifying cylinder 41 of the detoxifying device 4 from these data, indicates the exchange of the detoxifying cylinder 41 at the time of the decomposing time and indicates the discharge and the filling of the detoxifying filling and discharging device 5 with the detoxifying agent. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
