发明名称 |
SUBSTRATE PROCESSING APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for performing processes using a plurality of process liquids in sequence. SOLUTION: The apparatus is equipped with a process liquid recovering container for recovering process liquids. It also comprises an exhaust member for separating and exhausting the contamination gas generated as processes advance. COPYRIGHT: (C)2007,JPO&INPIT |
申请公布号 |
JP2007189232(A) |
申请公布日期 |
2007.07.26 |
申请号 |
JP20070004777 |
申请日期 |
2007.01.12 |
申请人 |
SEMES CO LTD |
发明人 |
KOO KYO-WOOG;KIM JEONG-MIN |
分类号 |
H01L21/306;G03F7/30;H01L21/304 |
主分类号 |
H01L21/306 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|