发明名称 STRUCTURE AND METHOD FOR MAKING HIGH DENSITY MOSFET CIRCUITS WITH DIFFERENT HEIGHT CONTACT LINES
摘要 Embodiments herein present a structure, method, etc. for making high density MOSFET circuits with different height contact lines. The MOSFET circuits comprise a contact line, a first gate layer situated proximate the contact line, and at least one subsequent gate layer situated over the first gate layer. The contact line comprises a height that is less than a combined height of the first gate layer and the subsequent gate layer(s). The MOSFET circuits further comprise gate spacers situated proximate the gate layers and a single contact line spacer situated proximate the contact line. The gate spacers are taller and thicker than the contact line spacer.
申请公布号 US2007170472(A1) 申请公布日期 2007.07.26
申请号 US20060306707 申请日期 2006.01.09
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ZHU HUILONG
分类号 H01L29/76 主分类号 H01L29/76
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