发明名称 Cantilever Microprobes For Contacting Electronic Components and Methods for Making Such Probes
摘要 Embodiments disclosed herein are directed to compliant probe structures for making temporary or permanent contact with electronic circuits and the like. In particular, embodiments are directed to various designs of cantilever-like probe structures. Some embodiments are directed to methods for fabricating such cantilever structures. In some embodiments, for example, cantilever probes have extended base structures, slide in mounting structures, multi-beam configurations, offset bonding locations to allow closer positioning of adjacent probes, compliant elements with tensional configurations, improved over travel, improved compliance, improved scrubbing capability, and/or the like.
申请公布号 US2007170940(A1) 申请公布日期 2007.07.26
申请号 US20070695597 申请日期 2007.04.02
申请人 MICROFABRICA INC. 发明人 CHEN RICHARD T.;KRUGLICK EZEKIEL J.;BANG CHRISTOPHER A.;SMALLEY DENNIS R.;LEMBRIKOV PAVEL B.
分类号 G01R31/02 主分类号 G01R31/02
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