SEMICONDUCTOR LIGHT-EMITTING ELEMENT, JUNCTION SUBSTRATE THEREFOR, AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To reduce the removal time of a starting substrate, and to reduce nonuniformity in etching.

SOLUTION: A junction substrate for semiconductor light-emitting elements is manufactured by laminating an epitaxial substrate Be having a semiconductor layer 40 containing at least a luminous layer formed at the first main surface side of the starting substrate, and a plurality of grooves 38 formed from the first main surface side of a semiconductor layer to the inside of the starting substrate, and a permanent substrate formed by a material differing from that of the starting substrate.

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