RESONANCE ACTUATOR

摘要

A resonance actuator comprises a drive section equipped with a displacement element oscillating at a resonance frequency or in a frequency region in the vicinity of the resonance frequency, and a member driven by the displacement element, wherein the displacement element has a piezoelectric ceramic element composed of a bismuth layer compound. Displacing direction of the displacement element is preferably identical to the polarizing direction of the piezoelectric ceramic element, the bismuth layer compound has the c-axis of crystal axis preferably oriented in the direction perpendicularly intersecting the polarizing direction of the piezoelectric ceramic element, and the degree of orientation of the c-axis is preferably 75% or above by Lot gering method. Consequently, even if saturation vibration speed is high and the vibration speed is increased, the vibration speed is not destabilized and a fall in resonance frequency fr or mechanical quality factor Qm can be suppressed as much as possible, resulting in a resonance actuator capable of providing a large displacement even if a high electric field is applied.