| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an illuminating optical system capable of correcting the polarization state of a luminous flux with high precision, and maintaining the polarization state at the illuminated surface in the desired state. <P>SOLUTION: This illuminating optical system for illuminating the illuminated surface with the luminous flux from a light source comprises a beam shaping unit for shaping the cross-sectional shape of the luminous flux from the light source; an integrator for dividing the luminous flux from the beam shaping unit; a condenser system for superposing the luminous flux divided by the integrator and guiding it to the illuminated surface; and an optical member arranged in the plane of incidence for the integrator or in the plane between the beam shaping unit and the integrator, and conjugated with the plane of incidence for the integrator and having a birefringence distribution in the cross-section orthogonal to the optical axis. <P>COPYRIGHT: (C)2007,JPO&INPIT |
