| 摘要 |
<P>PROBLEM TO BE SOLVED: To cancel reaction force and reaction force moment caused when a stage is driven. <P>SOLUTION: A stage apparatus 10 comprises an X stage 30, a stone surface plate 40, canceling actuators 60A, 60B for canceling vibration caused by reaction force, and a mount 70. A control part 80 is connected to a reaction force processing operation part 90 and has a signal route 86 branched so as to supply a stage drive command (b) from a controller 82 to the reaction force processing operation part 90. The reaction force processing operation part 90 comprises a cancel thrust operation part 92 to which the stage drive command (b) is input and drivers 94a to 94d for generating a drive signal (f) corresponding to a reaction force drive command (e) from the cancel thrust operation part 92. The cancel thrust operation part 92 calculates a drive command (e) to the canceling actuators 60A, 60B so as to generate thrust corresponding to the level of reaction force caused when an X linear motor 26 drives the X stage 30. <P>COPYRIGHT: (C)2007,JPO&INPIT |
