Microcontact printed thin film capacitors

摘要

The invention relates to thin film single layers, electronic components such as multilayer capacitors which utilize thin film layers, and to their methods of manufacture. Chemical solution deposition and microcontact printing of dielectric and electrode layers are disclosed. High permittivity BaTiO₃ multilayer thin film capacitors are prepared on Ni foil substrates by microcontact printing and by chemical solution deposition. Multilayer capacitors with BaTiO₃ dielectric layers and LaNiO₃ internal electrodes are prepared, enabling dielectric layer thicknesses of 1 mum or less. Microcontact printing of precursor solutions of the dielectric and electrode layers is used.